For specimens with high carbon content or those mounted on carbon support grids, shielded specimen holder ports further optimize the cleaning process.
The Plasma Cleaner is fully compatible with side-entry specimen holders for all commercial TEMs and STEMs, as well as bulk specimens for pre-cleaning before SEM or surface analysis. It includes a specimen holder port of the customer’s choice, a pumping port assembly, and a blank plug assembly for seamless integration into your workflow.
Contamination in electron microscopy can originate from various sources, such as accidental specimen or holder contact, oil back-streaming from diffusion-pumped ion milling systems, contamination within the microscope column, and residues from adhesives or solvents used during specimen preparation. Despite careful cleaning, traditional methods often fall short in fully eliminating contaminants.
Plasma cleaning provides a highly effective solution by removing carbonaceous debris from specimens and preventing further contamination during imaging and analysis. Using a low-energy, inductively coupled high-frequency plasma, it cleans surfaces thoroughly without altering their elemental composition or structural integrity. Even heavily contaminated specimens can be cleaned in less than two minutes.
The plasma cleaner is designed to accommodate a wide range of materials and preparation techniques, making specimen holder insertion quick and easy. A single port leads into the plasma chamber, featuring a vacuum-sealing surface compatible with the specimen holder’s O-ring, and the port can be swapped in just 10 seconds for maximum efficiency.
Oil-free turbomolecular drag pump and a multistage diaphragm pump
Ultimate vacuum of 1 x 10-7 mbar
25% oxygen and 75% argon
Nominal 10 psi (200 kPa) delivery pressure
Flow rate is factory set and can be adjusted via a potentiometer located on the service pane
23.2 in (59 cm) width x 20.4 in (52 cm) height x 23.2 in (59 cm) depth
Single control panel to initiate vacuum, plasma, and timer
Process timer for automatic termination
Service panel is easily accessible
High frequency (13.56 MHz) oscillating field system coupled to a quartz and stainless steel plasma chamber
Ion energies less than 12 eV
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Application Note