Fischione 1040 NanoMill
NanoMill®: The Ultimate Solution for TEM Specimens
The NanoMill® system revolutionizes specimen preparation with its ultra-low energy, inert gas, concentrated ion beam, ensuring surfaces free from amorphous damage and implanted layers. Designed to deliver the highest quality results, it is the perfect tool for final-stage polishing of FIB-milled specimens, enhancing transmission electron microscopy (TEM) imaging and analysis with unmatched precision
Features
NanoMill®: Redefining TEM Specimen Perfection
As nanotechnology and semiconductor devices push the limits of miniaturization, transmission electron microscopy (TEM) remains the gold standard for analyzing microstructure and properties. With ever-shrinking features and the rise of aberration-corrected TEMs achieving sub-Ångström resolution, specimen quality is more critical than ever—requiring ultra-thin samples free from preparation-induced artifacts.
The NanoMill® system meets these demands with an ultra-low energy, concentrated ion beam, delivering the highest-quality TEM specimens with minimal damage and maximum precision.
- Ultra-low-energy, inert-gas ion source for artifact-free thinning
- Concentrated ion beam with scanning capabilities for precise control
- Effectively removes damaged layers without redeposition
- Optimized for post-focused ion beam (FIB) processing
- Enhances conventionally prepared TEM specimens for superior imaging
- Room temperature to cryogenically cooled NanoMillingSM process for heat-sensitive materials
- Rapid specimen exchange for high-throughput applications
- Computer-controlled, fully programmable operation for ease of use
- Contamination-free, dry vacuum system for pristine sample preparation
For researchers pushing the boundaries of TEM imaging, the NanoMill® system ensures your specimens meet the highest standards of precision, clarity, and reliability.
Specifications
Filament-based ion source combined with electrostatic lens system
Variable voltage (50 eV to 2 kV), continuously adjustable
Beam current density up to 1 mA/cm2
Beam diameter as small as 1 µm at 2,000 eV
Faraday cup for ion beam current monitoring with a range of 1 to 2,000 pA
Field-replaceable apertures
Load lock allows specimen exchange in less than 10 seconds
Transfer rod for specimen exchange
Milling angle range of −10 to +30°
Stage can be rotated both clockwise and counter-clockwise; the maximum angle is 180°
Stage rotation enables horizontal alignment of the specimen, which enables improved placement of the milling box
Automated using mass flow control technology
Flow rate up to 2 sccm
Integral particulate filter
Inert gas (argon) with recommended purity of 99.999%
Liquid nitrogen conductive cooling with automatic temperature interlocks
Stage temperature to –170 °C
System cool-down time less than 20 minutes
Specimen cool-down time less than 5 minutes
Dewar hold time up to 6 hours
SED-based imaging technology
1.8 mm field of view
Everhart-Thornley detector
Specimen image displayed on graphical user interface