The Thermo Scientific Helios 5 DualBeam enhances the high-performance imaging and analytical capabilities of the renowned Helios DualBeam family. It has been meticulously engineered to fulfill the demands of materials science researchers and engineers across a broad spectrum of focused ion beam scanning electron microscopy (FIB-SEM) applications, even for the most complex samples.
The Helios 5 DualBeam sets a new benchmark for high-resolution imaging, delivering exceptional materials contrast and facilitating fast, straightforward, and precise sample preparation for (S)TEM imaging and atom probe tomography (APT), as well as high-quality subsurface and 3D characterization. Building on the established strengths of the Helios DualBeam family, this new model incorporates enhancements aimed at optimizing the system for both manual and automated workflows. Notable improvements include:
The Thermo Scientific Helios 5 DualBeam belongs to the fifth generation of the prestigious Helios DualBeam family. It is thoughtfully crafted to serve the needs of scientists and engineers, integrating the advanced Elstar electron column for exceptional high-resolution imaging and high materials contrast with the cutting-edge Thermo Scientific Tomahawk Ion Column for swift, easy, and precise sample preparation. Alongside its state-of-the-art electron and ion optics, the Helios 5 DualBeam features a comprehensive suite of technologies that enable simple and reliable high-resolution (S)TEM and atom probe tomography (APT) sample preparation, along with high-quality subsurface and 3D characterization, even for the most challenging samples.
High-Quality Sample Preparation
Site-specific sample preparation for (S)TEM and APT analysis is achieved using the high-throughput Thermo Scientific Tomahawk Ion Column or the Thermo Scientific Phoenix Ion Column, both of which deliver unparalleled low-voltage performance.
Fully Automated
Experience fast, straightforward, fully automated, and unattended multi-site in situ and ex situ TEM sample preparation and cross-sectioning with the optional AutoTEM 5 Software.
Quick Access to Nanoscale Information
The best-in-class Thermo Scientific Elstar Electron Column is equipped with Thermo Scientific SmartAlign and FLASH technologies, making it accessible for users of any experience level to obtain nanoscale information rapidly.
Advanced UC+ Monochromator Technology
Uncover intricate details with the next-generation UC+ monochromator technology, which offers higher current capabilities for sub-nanometer performance at low energy levels.
Comprehensive Sample Information
Achieve sharp, refined, and charge-free contrast through up to six integrated in-column and below-the-lens detectors, providing complete sample information.
3D Analysis
Obtain high-quality, multi-modal subsurface and 3D data with precise targeting of regions of interest using the optional Thermo Scientific Auto Slice & View 4 (AS&V4) Software.
Rapid Nanoprototyping
Facilitate the fast, accurate, and precise milling and deposition of complex structures with critical dimensions of less than 10 nm.
Precise Sample Navigation
Tailored for specific application needs, the system features a high-stability, high-accuracy 150-mm piezo stage or the versatile 110-mm stage, along with the in-chamber Thermo Scientific Nav-Cam Camera.
Artifact-Free Imaging
Benefit from integrated sample cleanliness management and dedicated imaging modes, such as DCFI and SmartScan Modes, for artifact-free imaging.
STEM Imaging
The Thermo Scientific Helios 5 FX configuration provides a high-productivity workflow, featuring unique in-situ STEM capability with a remarkable resolution of 3Å.
• Ion beam current range: 1 pA – 100 nA
• Accelerating votlage range: 500 V – 30 kV
• Max horizontal field view: 0.9 nm at beam coincidence point
• Minimum source lifetime: 1.000 hours
• Elstar ultra-high-resolution field emission SEM column
• Magnetic immersion objective lens
• High-stability Schottky field emission gun to provide stable high-resolution analytical currents
• 0.6 nm at 30 kV STEM
• 0.6 nm at 15 kV
• 1.0 nm at 1 kV
• 0.9 nm at 1 kV with beam deceleration
• Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
• Elstar in-column SE/BSE detector (ICD)
• Elstar in-column BSE detector (MD)
• Everhart-Thornley SE detector (ETD)
• IR camera for viewing sample/column
• High-performance in-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)
• Thermo Scientific In-chamber Nav-Cam Camera for sample navigation
• Retractable, low-voltage, high-contrast, directional, solid-state backscatter electron detector (DBS)
• Retractable STEM 3+ detector with BF/ DF/ HAADF segments
• Integrated beam current measurement
• Stage: Flexible 5-axis motorized stage
• XY range: 110 nm
• Z range: 65 nm
• Rotation: 360° (endless)
• Tilt range: -15° to +90°