The Metrios 6 (S)TEM with the Ultra-X EDS detector brings a new level of EDS detection to high-throughput solutions. The advanced Ultra-X EDS detector provides a 4.45 srad solid angle, delivering at least 2x greater data collection efficiency than the previous generation of detectors. This enables collection of data in less time while preserving the integrity of beam-sensitive samples. In addition to these capabilities, Ultra-X unlocks new EDS analysis opportunities with the cleanest EDS spectra, (<1% spurious peaks)

Recipe-free Automation for (S)TEM Metrology

This fully automated, recipe-free system leverages machine-learning algorithms to drastically cut down setup time for new processes or sample types, offering both ease of use and scalability. Tailored Smart Automation is designed for specific applications, supporting various semiconductor devices like gate-all-around (GAA), DRAM, and 3D NAND. The new web-based segmenter and object detection algorithms speed up model training by 50x on device structures. Furthermore, Smart Automation is adaptable, ensuring compatibility with future semiconductor R&D and manufacturing advancements.