Scios 2
Ultra-high resolution, high-quality sample preparation and 3D characterization
- Focused ion beam scanning electron microscopy
The Thermo Scientific Scios 2 DualBeam is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system that provides outstanding sample preparation and 3D characterization performance for a wide range of samples, including magnetic and non-conductive materials. With innovative features designed to increase throughput, precision, and ease of use, the Scios 2 DualBeam is an ideal solution to meet the needs of scientists and engineers in advanced research and analysis across academic, governmental, and industrial research environments.
- TEM sample preparation
- Subsurface characterization
- Backscattered electron and secondary electron imaging
Features
Focused Ion Beam-Scanning Electron Microscopy (FIB-SEM)
The Thermo Scientific Scios 2 DualBeam is an advanced ultra-high-resolution FIB-SEM system, offering exceptional capabilities for sample preparation and 3D characterization. It is designed to handle a diverse range of materials, including magnetic and non-conductive samples. With its enhanced throughput, precision, and user-friendly features, the Scios 2 DualBeam is the perfect solution for scientists and engineers conducting advanced research in academic, government, and industrial settings.
Subsurface 3D Characterization
Understanding a sample’s internal structure is crucial for many applications. The Scios 2 DualBeam, equipped with optional Thermo Scientific Auto Slice & View 4 (AS&V4) software, enables fully automated acquisition of multi-modal 3D datasets. This includes BSE imaging for contrast, EDS for composition, and EBSD for crystallographic information. Together with Thermo Scientific Avizo Software, this system provides a comprehensive workflow for high-resolution 3D characterization at the nanoscale.
High-Resolution Imaging
At the core of the Scios 2’s imaging prowess is the NICol electron column, which delivers detailed nanoscale imaging across a range of working conditions. Whether in STEM mode at 30 keV for structural insights or at lower energies for surface imaging, the system excels in both. The integrated Thermo Scientific Trinity Detection System enables simultaneous acquisition of SE and BSE imaging. The Scios 2 also offers rapid nanoscale information from tilted or cross-sectional samples. Its optional below-the-lens detectors and electron-beam-deceleration mode allow for easy, fast capture of all signals.
TEM Sample Preparation
Modern research demands localized analysis of increasingly complex samples. The Scios 2 DualBeam, paired with Thermo Scientific AutoTEM 4 Software, allows for fast, straightforward preparation of site-specific, high-resolution S/TEM samples. The Sidewinder HT FIB column ensures precise milling and imaging, even at low voltages, while final polishing with low-energy ions minimizes surface damage, resulting in high-quality TEM lamella
Specifications
Electron beam resolution
Optimum WD
- 0.7 nm at 30 keV STEM
- 1.4 nm at 1 keV
- 1.2 nm at 1 keV with beam deceleration
Electron beam parameter space
- Beam current range: 1 pA to 400 nA
- Landing energy range: 20* eV – 30 keV
- Accelerating voltage range: 200 V – 30 kV
- Maximum horizontal field width: 3.0 mm at 7 mm WD and 7.0 mm at 60 mm WD
- Extra wide field of view (1×) available through standard navigation montage
Ion optics
- Acceleration voltage: 500 V – 30 kV
- Beam current range: 1.5 pA – 65 nA
- 15-position aperture strip
- Drift suppression mode as standard for non-conductive samples
- Minimum source lifetime: 1,000 hours
- Ion beam resolution: 3.0 nm at 30kV using selective edge method
Detectors
- Trinity Detection System (in-lens and in-column)
T1 segmented lower in-lens detector
T2 upper in-lens detector
T3 retractable in-column detector (Optional) - Up to four simultaneously detected signals
- Everhart-Thornley SE Detector (ETD)
- High-performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE) (Optional)
- Retractable low-voltage, high-contrast, segmented solid-state backscatter electron detector (DBS) (Optional)
- Retractable STEM 3+ detector with BF/ DF/ HAADF segments (Optional)
- IR camera for viewing sample and chamber
- In-chamber Nav-Cam sample navigation camera (Optional)
- Integrated beam current measurement
Stage and sample
- Trinity Detection System (in-lens and in-column)
T1 segmented lower in-lens detector
T2 upper in-lens detector
T3 retractable in-column detector (Optional) - Up to four simultaneously detected signals
- Everhart-Thornley SE Detector (ETD)
- High-performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE) (Optional)
- Retractable low-voltage, high-contrast, segmented solid-state backscatter electron detector (DBS) (Optional)
- Retractable STEM 3+ detector with BF/ DF/ HAADF segments (Optional)
- IR camera for viewing sample and chamber
- In-chamber Nav-Cam sample navigation camera (Optional)
- Integrated beam current measurement