Spectra 300 TEM
High resolution TEM and STEM microscope for all materials science and semiconductor applications.
Features
High energy resolution sources available
The Spectra 300 (S)TEM can be optionally equipped with either a high-energy-resolution extreme field emission gun (X-FEG)/Mono or an ultra-high-energy resolution X-FEG/UltiMono. The monochromators of both sources are automatically excited and tuned with single-click operation to achieve the highest energy resolution possible on each configuration by using OptiMono or OptiMono+ respectively (see video below).
The X-FEG/Mono can be automatically tuned from 1 eV down to 0.2 eV, while the X-FEG/UltiMono can be automatically tuned from 1 eV down to <30 meV.
Both sources can be operated from 30 – 300 kV to accommodate the widest range of specimens. Both can also be run in standard mode, with the monochromators switched off, to accommodate experiments that require high brightness, including STEM EDS mapping, ultra-high-resolution STEM, or high total current, such as TEM imaging, all with no compromise to the other specifications of the system. This flexibility gives the Spectra 300 (S)TEM the capability to function in settings where a large range of experiments are expected to be performed on one system.
The combination of enhanced mechanical stability, the latest 5th-order probe aberration correction and the high-resolution (S-TWIN) wide-gap pole piece results in an instrument with the highest commercially-available STEM resolution specifications.
The Spectra 300 (S)TEM, with X-FEG/Mono or X-FEG/UltiMono, offers STEM resolution specifications of 50 pm at 300 kV, 96 pm at 60 kV and 125 pm at 30 kV with 30 pA of probe current or 100 pA with the X-CFEG.
![High-angle annular dark-field (HAADF) images of GaN[212].](https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.full.high.jpg/1686072158305.jpg,https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.320.high.jpg/1686072158305.jpg,https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.480.high.jpg/1686072158305.jpg,https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.320.medium.jpg/1686072158305.jpg,https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.620.high.jpg/1686072158305.jpg,https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.320.low.jpg/1686072158305.jpg,https://www.thermofisher.com/gr/en/home/electron-microscopy/products/transmission-electron-microscopes/spectra-300-tem/jcr:content/MainParsys/accordion_8d6b/itemspar/accordionitem_4203/itemParsys/image_f260/foregroundimg.img.480.medium.jpg/1686072158305.jpg "High-angle annular dark-field (HAADF) images of GaN[212].")
Unprecedended sensitivity with the Panther detection system
STEM imaging on the Spectra 200 (S)TEM has been re-imagined with the Panther STEM detection system, which includes a new data acquisition architecture and two new, solid state, eight-segment ring and disk STEM detectors (16 segments in total). The new detector geometry offers access to advanced STEM imaging capability combined with the sensitivity to measure single electrons.
Advanced STEM capabilities
The Spectra 300 (S)TEM can be configured with an electron microscope pixel array detector (EMPAD) or a Thermo Scientific Ceta Camera with speed enhancement to collect 4D STEM data sets.
The EMPAD is capable of 30-300 kV and provides a high dynamic range (1:1,000,000 e- between pixels), high signal-to-noise ratio (1/140 e-), and high speed (1100 frames per second) on a 128 x 128 pixel array, which makes it the optimal detector for 4D STEM applications.
Spectroscopic flexibility
From high-throughput, high signal-to-noise ratio elemental mapping in EDS and EELS to probing oxidation states and surface phonons with ultra-high-resolution EELS, the Spectra 300 (S)TEM delivers the spectroscopic flexibility to meet a broad range of analytical needs.
The Spectra 300 (S)TEM offers configuration options to fit your research, including three different sources with varying energy resolutions (X-FEG Mono, X-FEG UltiMono, and X-CFEG), two EDS detector geometries (Super-X and Dual-X), and a selection of Gatan Continuum spectrometers and energy filters. This flexibility allows you to tailor the system to your specific experimental requirements.
The Thermo Scientific EDS detector portfolio provides multiple detector geometries to optimize EDS performance. Both configurations feature a symmetric design for generating quantifiable data. Holder shadowing due to tilt is automatically compensated for in both configurations using the integrated functionality of Thermo Scientific Velox Software.
The Spectra 300 (S)TEM can be equipped with either the Super-X detector (for spectrum cleanliness and quantification) or the Dual-X detector (for maximizing solid angle and enabling high-throughput STEM EDS mapping).
The Super-X detector system provides a highly collimated solid angle of 0.7 Sr and a Fiori number greater than 4000. Super-X is designed for STEM EDS experiments, where spectral cleanliness and quantification are critical.
The Dual-X detector system provides a solid angle of 1.76 Sr and a Fiori number greater than 2000. Dual-X is designed for high-throughput STEM EDS experiments, such as EDS tomography, or when signal yield is low and fast mapping is critical.
A DyScO3 perovskite system is examined with the Dual-X detectors below. The ultra-high brightness (>>1.0 x 108 A/m2/Sr/V*) of the X-CFEG and the resolving power of the S-CORR probe corrector are used to deliver a probe to the specimen with 150 pA of current and size <80 pm. With these high brightness probe conditions, EDS mapping can be done rapidly with high sampling and a high signal to noise ratio, resulting in, for the first time, sub-Angstrom spatial information in a single elemental, raw, and unfiltered EDS map. A fast Fourier transform of the Sc map shows up to 90 pm resolution. Additionally, the built-in EDS quantification engine in the Velox Software makes STEM EDS on Spectra 300 (S)TEM fast, easy and quantifiable.
Specifications
• Energy spread: 0.2 – 0.3 eV
• Information limit: 60 pm
• STEM resolution: 136 pm
• Energy spread: 0.2 – 0.3 eV
• Information limit: 100 pm
• STEM resolution: 50 pm (125 pm @ 30 kV)
• Energy spread: 0.2 – 0.3 eV
• Information limit: 60 pm
• STEM resolution: 50 pm (125 pm @ 30 kV)
• Energy spread: 0.4 eV
• Information limit: 70 pm
• STEM resolution: 50 pm (136 pm @ 30 kV)
• X-FEG Mono: High-brightness Schottky field emitter gun and monochromator with a tunable energy resolution range between 1 eV and <0.2 eV
• X-FEG UltiMono: High-brightness Schottky field emitter gun with ultra-stable monochromator and accelerating voltage with a tunable energy resolution range between 1eV and <0.03 eV
• X-CFEG: Ultra-high brightness with an intrinsic energy resolution of <0.4 eV
• Flexible high-tension range from 30 – 300 kV